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Fundamentals of Physical Chemistry (9781429265607) - Quantised variables.. and the physical significance of the wave function, an analysis of the elements of the Einstein-de Broglie relation. Variables in quantum mechanics are quanta of energy, momentum, position, and time.. The study of physical phenomena can beThe primary objective of this project is to define the pharmacologic basis of abnormal behavior produced in laboratory animals by anticonvulsants. The methods used will be the human, horse, and rat audiogenic convulsions tests. A secondary objective will be to determine some of the biological mechanisms of action of the anticonvulsants by studying the electroencephalogram (EEG), the rate of changes in intracellular pH, and the levels of cyclic nucleotides and serotonin in the cerebral cortex and brain stem of convulsion-prone and convulsion-resistant animals.The invention relates generally to the field of chemical mechanical planarization of semiconductor wafers and more particularly to systems and methods for improved chemical mechanical planarization of a wafer.
In the fabrication of integrated circuits, numerous conductive layers are used to interconnect the various elements of the circuit. Many integrated circuit fabrication processes require the formation of planar layers of polysilicon or other conductive material on a substrate to form integrated circuit elements such as transistors, capacitors, and the like. The substrate generally comprises a semiconductor wafer which typically is about 300 to about 450 mm in diameter and 1 to 10 mils thick. However, the dimensions of substrates can vary and the particular dimensions of any given wafer or substrate will depend on the particular fabrication process and end use.
One process of particular importance is the chemical mechanical planarization (CMP) process for planarizing or polishing one or more conductive layers on the substrate. CMP uses a combination of chemical and mechanical forces to planarize the surface of the substrate and is well known to those skilled in the art. In general, conventional CMP processes involve rubbing a polishing surface of a CMP tool with a carrier head that carries a wafer and rotating the wafer and the tool together about their respective centers. The carrier head creates a down force that presses the backside of the wafer against
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